Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition

Rotational spatial plasma-enhanced atomic layer deposition has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ±1% is demonstrated for Nb₂O₅ deposited at 1.4 Å/s and for SiO₂ deposited at 6 Å/s.