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Related Experiment Video

Updated: Dec 25, 2025

Polymeric Microneedle Array Fabrication by Photolithography

Polymeric Microneedle Array Fabrication by Photolithography

Published on: November 17, 2015

Multifocal microlens arrays using multilayer photolithography.

Sang-In Bae, Kisoo Kim, Sungpyo Yang

|April 1, 2020

Summary

This summary is machine-generated.

Researchers developed a novel microfabrication technique for multifocal microlens arrays (MF-MLAs) to enhance depth-of-field (DoF). This method enables the creation of lenses with varied focal lengths for advanced 3D imaging applications.

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Last Updated: Dec 25, 2025

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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

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Published on: January 27, 2017

Area of Science:

Optics and Photonics
Microfabrication Technologies
Materials Science

Background:

Extended depth-of-field (DoF) is crucial for advanced imaging systems.
Current microlens array fabrication methods face limitations in achieving multifocal capabilities.
Multifocal imaging enhances the information captured by optical sensors.

Purpose of the Study:

To introduce a new microfabrication method for creating multifocal microlens arrays (MF-MLAs).
To achieve extended depth-of-field (DoF) through precisely controlled, varied focal lengths.
To demonstrate the potential of MF-MLAs in 3D imaging applications.

Main Methods:

Utilized multilayer photolithography with multiple photomasks to define microposts of varying thicknesses.
Employed concurrent thermal reflow of multi-stacked microposts to simultaneously fabricate microlenses.
Controlled individual lens curvature and focal length by adjusting micropost thickness.

Main Results:

Successfully fabricated hexagonally packaged MF-MLAs with distinct focal lengths (249 µm, 310 µm, 460 µm) for 200 µm diameter lenses.
Achieved precise control over diverse lens curvatures through micropost thickness.
Demonstrated the generation of multifocal images on a single image sensor.

Conclusions:

The reported multilayer photolithography and thermal reflow method offers a novel route for MF-MLA fabrication.
This technique enables simultaneous fabrication of microlenses with different focal lengths on a single substrate.
The developed MF-MLAs are suitable for advanced 3D imaging applications, including light-field cameras and medical endoscopes.