Testing the mid-spatial frequency error of a large aperture long-focal-length lens with CGH

We present the use of a computer-generated hologram (CGH) to test the mid-spatial frequency error of a large aperture long-focal-length lens. In order to verify this test approach, a 450 mm × 450 mm reflective CGH is designed and fabricated for testing the 440 mm × 440 mm spatial filter lens. Both 0^th and 1^st order diffraction wavefront of CGH are measured, and the 0^th order diffraction wavefront is used to calibrate the substrate error. The mid-spatial frequency wavefront error caused by the CGH fabrication errors are evaluated using the binary linear grating model and power spectral density (PSD) theory. Experimental results and error analysis show that the CGH test approach is also feasible for the measurement of mid-spatial frequency error, and the measurement accuracy of PSD1 can reach 0.8832 nm RMS.