System design and error correction for 300  mm aperture vertical Fizeau spatial-temporal phase-shifting interferometer

Area of Science:

• Optics and Photonics
• Metrology
• Optical Engineering

Background:

• Growing demand for large-aperture planar optical elements in high-power laser applications (aerospace, electronics).
• Need for advanced measurement techniques to meet the precision requirements of these optical elements.

Purpose of the Study:

• To design and demonstrate a 300 mm aperture vertical Fizeau interferometer.
• To integrate spatial and temporal phase-shifting techniques for enhanced measurement capabilities.
• To validate the system's accuracy and ability to measure dynamic objects.

Main Methods:

• Design of a vertical Fizeau interference system with a laser source array for spatial phase-shifting.
• Integration of a tunable laser diode for temporal phase-shifting via wavelength tuning.
• Demonstration of key techniques: laser duplication, conjugate imaging, interferogram separation, and transmission flat assembly.

Main Results:

• Successful implementation of spatial phase-shifting using a laser source array.
• Realization of temporal phase-shifting through wavelength tuning.
• Elimination of systematic and position mismatch errors in interferograms.
• Demonstrated accuracy through comparison experiments and measurement of a dynamic water surface.

Conclusions:

• The developed 300 mm aperture vertical Fizeau interferometer effectively combines spatial and temporal phase-shifting.
• The system achieves high accuracy in measuring large-aperture optical elements.
• The interferometer is capable of measuring dynamic objects, showcasing its versatility.