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Updated: Dec 25, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform.

Dachuan Wu, Yasha Yi, Yuxiao Zhang

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    Summary
    This summary is machine-generated.

    This study introduces a novel multi-layer silicon nitride/silicon dioxide platform for 3D optical phased arrays (OPAs). This advanced structure significantly reduces energy loss, enabling high-efficiency beam steering for Lidar and wireless communication.

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    Area of Science:

    • Photonics and Optical Engineering
    • Integrated Optics
    • Semiconductor Devices

    Background:

    • Optical phased arrays (OPAs) are crucial for solid-state Lidar and wireless communication.
    • Conventional single-layer OPAs suffer from energy loss due to substrate leakage via grating couplers.

    Purpose of the Study:

    • To investigate a multi-layer Si3N4/SiO2 platform for developing efficient 3D OPAs.
    • To achieve high-efficiency edge-emission and end-fire beam steering.

    Main Methods:

    • Numerical simulation of a 3D OPA structure using a multi-layer Si3N4/SiO2 platform.
    • Analysis of beam steering efficiency, vertical crosstalk, delay length, and waveguide layer count.
    • Assessment of fabrication feasibility.

    Main Results:

    • Demonstrated high efficiency and wide horizontal beam steering numerically.
    • Identified key parameters influencing performance, including vertical crosstalk and layer configuration.
    • Evaluated the practical fabrication aspects of the proposed 3D OPA.

    Conclusions:

    • The multi-layer Si3N4/SiO2 platform offers a promising solution for efficient 3D OPAs.
    • This approach mitigates energy loss issues present in traditional OPAs.
    • The findings support the development of advanced beam-steering devices for next-generation communication and sensing.