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Updated: Dec 25, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
This study introduces a novel multi-layer silicon nitride/silicon dioxide platform for 3D optical phased arrays (OPAs). This advanced structure significantly reduces energy loss, enabling high-efficiency beam steering for Lidar and wireless communication.
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