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Development of low-loss TiO2 waveguides.

I Hegeman, M Dijkstra, F B Segerink

    Optics Express
    |April 1, 2020
    PubMed
    Summary
    This summary is machine-generated.

    Titanium dioxide (TiO2) channel waveguides were fabricated and characterized. These waveguides exhibit low propagation losses, particularly at longer wavelengths, making them suitable for optical applications.

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    Area of Science:

    • Materials Science
    • Optoelectronics
    • Nanotechnology

    Background:

    • Titanium dioxide (TiO2) is a promising material for optical waveguides due to its high refractive index.
    • Fabrication of high-quality TiO2 waveguides is crucial for efficient light propagation.

    Purpose of the Study:

    • To fabricate TiO2 channel waveguides using DC sputter deposition, photolithography, and reactive ion etching.
    • To characterize the structural properties and propagation losses of the fabricated waveguides.

    Main Methods:

    • DC sputter deposition for TiO2 film growth.
    • Photolithography and reactive ion etching for channel definition.
    • Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Raman spectroscopy for structural analysis.
    • Scattered light imaging for propagation loss measurement.

    Main Results:

    • TiO2 waveguides exhibited both amorphous and crystalline phases, with polycrystalline structures forming at increased layer thicknesses.
    • Propagation losses were measured to be 7.8 ± 0.52 dB/cm at 632.8 nm and 0.68 ± 0.46 dB/cm at 1010 nm.

    Conclusions:

    • TiO2 channel waveguides can be successfully fabricated using the described methods.
    • The characterized propagation losses suggest potential for TiO2 in integrated optical devices, especially at longer wavelengths.