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    This study presents an improved through-focus scanning optical microscopy (TSOM) method. It enhances precision and repeatability for nanoscale semiconductor measurements by correcting image instability using Fourier transforms.

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    Area of Science:

    • Optical Metrology
    • Nanoscale Measurement
    • Semiconductor Inspection

    Background:

    • Through-focus scanning optical microscopy (TSOM) is a cost-effective, non-destructive technique for nanoscale semiconductor metrology.
    • Instability from target movement and illumination non-uniformity limits TSOM's precision and applications.
    • Current TSOM methods require extensive optical alignment and post-acquisition image correction.

    Purpose of the Study:

    • To introduce an improved TSOM method utilizing Fourier transforms for enhanced accuracy.
    • To address and correct image instability issues inherent in traditional TSOM.
    • To improve the precision and repeatability of nanoscale measurements using TSOM.

    Main Methods:

    • Collected a series of experimental through-focus (TF) images by scanning the optical microscopy objective.
    • Generated ideally simulated TF images using a full-vector formulation.
    • Aligned experimental images to simulated counterparts before constructing the corrected TSOM image via Fourier transform.

    Main Results:

    • The improved TSOM method effectively corrects for lateral target movement and illumination non-uniformity.
    • Demonstrated significant improvements in measurement precision and repeatability compared to standard TSOM.
    • Validated the method's capability to enhance TSOM performance for nanoscale targets.

    Conclusions:

    • The presented Fourier transform-based TSOM correction method significantly enhances measurement accuracy.
    • This improved technique holds promise for reliable online and in-machine nanoscale measurements in semiconductor manufacturing.
    • Further development could expand TSOM's applicability in demanding industrial metrology settings.