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Related Experiment Video

Updated: Dec 25, 2025

Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
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Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging

Published on: September 8, 2017

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Supercritical lens array in a centimeter scale patterned with maskless UV lithography.

Xufeng Zhu, Wei Fang, Jian Lei

    Optics Letters
    |April 3, 2020
    PubMed
    Summary
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    Researchers developed a high numerical aperture (NA) supercritical lens (SCL) array to create sub-diffraction-limited focal spots. This breakthrough overcomes limitations of conventional microlens arrays (MLAs) for advanced optical applications.

    Area of Science:

    • Optics and Photonics
    • Materials Science

    Background:

    • Conventional refractive and diffractive microlens arrays (MLAs) are limited by diffraction, restricting their light modulation capabilities.
    • Existing MLA technologies are insufficient for applications requiring sub-diffraction-limited performance.

    Purpose of the Study:

    • To propose and experimentally demonstrate a novel high numerical aperture (NA) supercritical lens (SCL) array.
    • To achieve sub-diffraction-limited focal spot lattices with uniform intensity.

    Main Methods:

    • Fabrication of a SCL array using ultrafast ultraviolet lithography.
    • Design of elementary SCL units with micrometer-scale concentric belts.

    Main Results:

    • Demonstration of a sub-diffraction-limited focal spot lattice in the far field.

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  • Achieved uniform focal spot intensity with lateral sizes around 0.45λ/NA (0.75X Airy unit).
  • Successfully patterned a centimeter-scale SCL array within 10 minutes.

    • Conclusions:

    • The developed SCL array offers superior light modulation beyond the diffraction limit.
    • This technology enables potential advancements in optical nanofabrication, super-resolution imaging, and optical manipulation.