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Understanding Pore Formation in ALD Alumina Overcoats.

Cassandra George1, Patrick Littlewood1, Peter C Stair1

  • 1Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, United States.

ACS Applied Materials & Interfaces
|April 16, 2020
PubMed
Summary
This summary is machine-generated.

Atomic layer deposition (ALD) of aluminum oxide (AlO) films creates tunable nanoscale porosity upon heating. This pore formation is controllable by deposition temperature and hydroxyl content, enabling advanced catalyst design.

Keywords:
ALDnanoparticlesporosityselective catalysisthin films

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Catalysis

Background:

  • Aluminum oxide (AlO) thin films enhance supported palladium catalyst stability and selectivity.
  • ALD-deposited AlO films are known to develop nanoscale porosity when heated.
  • Controlling porosity in ALD films is key for designing advanced catalytic materials.

Purpose of the Study:

  • To understand factors influencing porosity development in ALD AlO thin films.
  • To establish correlations between deposition conditions, material properties, and pore formation.
  • To enable future design of layered catalytic structures with tunable nanoscale features.

Main Methods:

  • Overcoating porous and nonporous supports with 2-7 nm AlO films via ALD at 100, 200, and 300 °C.
  • Analyzing hydroxyl loss, surface chemistry changes, surface area, and pore volume of annealed films.
  • Correlating observed changes to ALD deposition temperature and the presence of palladium nanoparticles.

Main Results:

  • Hydroxyl loss and surface chemistry alterations were observed upon heating ALD AlO films.
  • Annealed film surface area and pore volume correlated with deposition temperature and Pd presence.
  • Crystallization to γ-Al2O3 occurred independently of hydroxyl loss and pore formation.
  • A direct, tunable correlation between pore development and AlO hydroxyl content was established.

Conclusions:

  • Pore formation in ALD AlO films is mechanistically understood through structural transformations of transition aluminas.
  • ALD deposition temperature and hydroxyl content are critical, tunable parameters for controlling nanoscale porosity.
  • This work provides a foundation for designing catalytic structures with tailored porosity using ALD AlO.