Development of Method Enhanced Laser Ablation Efficiency According to Fine Curvature of the Polymer through the...

In processes using the ultrashort pulsed laser, the phenomenon that the ablation efficiency is reduced due to the increase of the shielding effect of the generated plume is increasingly caused by the use of the high power and high repetition rate. A new method is needed to prevent a decrease in ablation efficiency in processing using an ultrashort pulsed laser. In this study, the proposed a processing method that can improve the ablation efficiency by providing an efficient escape path of plume, and examine the feasibility of a new processing method. The new method we proposed is a method of laser processing after generating a fine curvature in the polymer as a preliminary preparation. The fine curvature of the polymer produced by the preliminary preparation induces an artificial chimney-like opening along the path of the incident beam during laser processing, thereby enabling the plume to be effectively removed. The experiment for examine the feasibility through a new method was conducted using a 10-picosecond laser of UV wavelength with two optical systems. As a new processing method, when processing with ultrashort pulse laser, it was observed that the ablation efficiency improved.