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Updated: Dec 23, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dingkang Wang1, Connor Watkins1, Huikai Xie1
1Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA.
Microelectromechanical Systems (MEMS) scanning mirrors are crucial for Light Detection and Ranging (LiDAR) in autonomous vehicles. This review details MEMS mirror advantages, a figure of merit, and assesses current LiDAR systems.
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