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Related Experiment Video

Updated: Dec 23, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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MEMS Mirrors for LiDAR: A review.

Dingkang Wang1, Connor Watkins1, Huikai Xie1

  • 1Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA.

Micromachines
|May 1, 2020
PubMed
Summary

Microelectromechanical Systems (MEMS) scanning mirrors are crucial for Light Detection and Ranging (LiDAR) in autonomous vehicles. This review details MEMS mirror advantages, a figure of merit, and assesses current LiDAR systems.

Keywords:
LiDARlaser scanningmems mirrormicromirroroptical scanner

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Area of Science:

  • Optics and Photonics
  • Robotics and Autonomous Systems
  • Materials Science and Engineering

Background:

  • Light Detection and Ranging (LiDAR) is essential for autonomous vehicles, providing accurate 3D data.
  • Microelectromechanical Systems (MEMS) scanning mirrors offer advantages in size, speed, and cost for LiDAR systems.

Purpose of the Study:

  • To provide an overview of MEMS scanning mirrors for LiDAR applications.
  • To define and utilize a figure of merit (FoM) for comparing MEMS mirrors in LiDAR.

Main Methods:

  • Review of MEMS mirror technologies and their suitability for LiDAR.
  • Definition of a figure of merit (FoM) based on aperture size, field of view (FoV), and resonant frequency.
  • Comparison of various MEMS mirrors using the defined FoM.

Main Results:

  • MEMS mirrors exhibit significant advantages for LiDAR scanners.
  • A comprehensive comparison of different MEMS mirror actuation mechanisms is presented using the FoM.
  • A preliminary assessment of commercially available MEMS-scanned LiDAR systems is provided.

Conclusions:

  • MEMS mirrors are a key enabling technology for compact, cost-effective LiDAR systems.
  • The defined FoM provides a valuable metric for selecting MEMS mirrors for LiDAR.
  • Further development and assessment of off-the-shelf MEMS LiDAR systems are warranted.