Novel Ultra Localized and Dense Nitrogen Delta-Doping in Diamond for Advanced Quantum Sensing.

Area of Science:

• Materials Science
• Quantum Technologies
• Nanotechnology

Background:

• Nitrogen-vacancy (NV) centers in diamond are crucial for quantum sensing.
• Deterministic patterning of NV centers is essential for advanced device fabrication.
• Achieving high NV densities while maintaining crystal quality remains a challenge.

Purpose of the Study:

• To introduce a novel approach for deterministic NV patterning in diamond.
• To create a nanometer-thin, dense delta-doped layer of NV centers.
• To enhance the performance of NV-based quantum devices.

Main Methods:

• Utilized a pure nitridation stage with microwave plasma.
• Performed subsequent *in situ* diamond overgrowth.
• Applied delta-doping technique to fabricated diamond nanostructures.

Main Results:

• Achieved deterministic, nanometer-thin, and dense delta-doped NV layers.
• Reported the highest nitrogen concentration (1.8 × 10^20 cm^-3) in a delta-doped layer.
• Maintained pristine diamond crystal quality and high optically detected magnetic resonance contrast.

Conclusions:

• The developed delta-doping technique enables precise NV patterning.
• This method facilitates the creation of highly sensitive NV-based magnetometers.
• Topographic NV patterning on nanostructures enhances sensing and hyperpolarization capabilities.