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Short-pulse KrF amplifier using spatially tunable x-ray preionization.

¹Department of Experimental Physics, University of Szeged, Dóm tér 9, H-6720 Szeged, Hungary.

The Review of Scientific Instruments

|May 3, 2020

Summary

Achieving homogeneous excitation in large-volume excimer amplifiers requires precise x-ray preionization. This study demonstrates tuning x-ray preionization for optimal discharge, enabling efficient KrF excimer amplification.

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Area of Science:

High-power laser systems
Excimer laser technology
Plasma physics

Background:

Excimer amplifiers need large cross sections for short pulse amplification due to low saturation energy density.
Homogeneous excitation of gas mixtures via discharge pumping depends critically on pumping and preionization properties.
Intense, spatially and temporally controlled x-ray preionization is typically essential for large-volume discharge pumping.

Purpose of the Study:

To present design considerations and experimental realization of a KrF excimer amplifier with a large cross section.
To demonstrate a method for spatially tunable x-ray preionization.
To control discharge homogeneity and optimize excitation in large-volume gas mixtures.

Main Methods:

Utilizing a KrF excimer amplifier with a 5 × 4 cm² cross section.
Implementing a tunable x-ray preionization system using two cylindrical x-ray guns.
Reducing x-ray flash pulse duration to ~16 ns and positioning the source near the active volume.
Theoretical and experimental validation of preionization spatial distribution tuning.

Main Results:

Demonstrated successful tuning of x-ray preionization spatial distribution to optimal levels.
Achieved control over discharge spatial distribution, compensating for E-field inhomogeneities.
Experimental realization of a KrF excimer amplifier with tunable x-ray preionization.
Showcased a practical method for optimizing discharge geometry and homogeneity.

Conclusions:

Spatially tunable x-ray preionization is a viable method for controlling discharge homogeneity in large-volume excimer amplifiers.
This technique allows for compensation of E-field variations and tuning of the discharge to desired geometries.
The presented KrF excimer amplifier design and preionization method offer a practical approach to efficient high-power short-pulse generation.