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Nanometer-Scale Vibration Measurement Using an Optical Quadrature Interferometer based on 3 × 3 Fiber-Optic Coupler.

Soongho Park1, Juhyung Lee1, Younggue Kim1

  • 1School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, 123 Cheomdangwagi-ro, Buk-gu, Gwangju 61005, Korea.

Sensors (Basel, Switzerland)
|May 13, 2020
PubMed
Summary
This summary is machine-generated.

This study presents a novel optical quadrature interferometer for precise nanometer-scale displacement and vibration measurements. A post-processing technique using Lissajous curve analysis enables accurate characterization and measurement of nanoscale movements.

Keywords:
3 × 3 fiber-optic couplerLissajous curvedisplacement measurementellipse fitting methodoptical interferometeroptical quadrature detectionvibration measurement

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Nanotechnology

Background:

  • Accurate measurement of nanometer-scale displacement and vibration is crucial for various scientific and industrial applications.
  • Traditional interferometric systems can be affected by system parameter variations, limiting measurement precision.

Purpose of the Study:

  • To develop a robust nanometer-scale displacement and vibration measurement system.
  • To implement a post-processing technique for accurate characterization of interferometric systems.
  • To overcome limitations caused by detector gain inequalities and phase variations in fiber-optic couplers.

Main Methods:

  • Utilized an optical quadrature interferometer with a 3x3 fiber-optic coupler.
  • Reconstructed complex interference signals from two measured signals.
  • Employed Lissajous curve analysis by fitting to an ellipse to extract system parameters.
  • Applied post-processing techniques to correct for system imperfections.

Main Results:

  • Successfully reconstructed the entire complex interference signal.
  • Identified and corrected for unequal detector gains and non-uniform intrinsic phases.
  • Demonstrated nanometer-scale measurement capability.
  • Measured a 20 kHz sinusoidal vibration with 1.5 nm amplitude and 0.4 nm standard deviation.

Conclusions:

  • The proposed optical quadrature interferometer and post-processing technique enable accurate nanometer-scale displacement and vibration measurements.
  • Lissajous curve analysis effectively characterizes and corrects for system imperfections.
  • The system offers a reliable solution for high-precision metrology.