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A Review of MEMS Capacitive Microphones

Siti Aisyah Zawawi1,2, Azrul Azlan Hamzah1, Burhanuddin Yeop Majlis1

  • 1Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.

Micromachines
|May 14, 2020
PubMed

Keywords:
acoustic sensorcapacitive microphonecondenser microphoneevolutionmicro-electro-mechanical system (MEMS)

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