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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Phase defect detection of large-aperture optics with static multiplanar coherent diffraction imaging.

Hongchang Wang, You Li, Zhaoyang Jiao

    Applied Optics
    |May 14, 2020
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    This study presents an efficient method for detecting micrometer-scale phase defects on large optics. The technique uses dark-field imaging and coherent diffraction to achieve high-resolution defect detection with improved efficiency.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Precision Measurement

    Background:

    • Detecting micrometer-scale phase defects on large optical elements is crucial for precision optical systems.
    • Existing methods like interferometry face challenges with optical path complexity and defect distribution requirements.

    Purpose of the Study:

    • To propose and demonstrate an efficient, high-resolution scheme for phase defect detection on large aperture optics.
    • To overcome limitations of traditional methods by improving detection efficiency and simplifying the optical setup.

    Main Methods:

    • Dark-field imaging with large aperture photon sieves for defect positioning.
    • Static multiplanar coherent diffraction imaging for phase retrieval in a small field of view.
    • Utilizing a spatial light modulator as a multifocal negative lens to mitigate mechanical errors.

    Main Results:

    • Successful detection of phase defects with a resolution better than 50 µm.
    • Demonstrated improved detection efficiency and cost-effectiveness compared to traditional methods.
    • The proposed system offers a simpler optical path and does not require sparse defect distribution.

    Conclusions:

    • The developed scheme provides an effective method for rapid, high-accuracy, and high-resolution phase defect detection on large optics.
    • This technique offers a significant advancement for quality control in precision optical systems.
    • The use of a negative lens enhances system configuration flexibility.