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Soft x-ray laser beamline for surface processing and damage studies.

Masahiko Ishino, Thanh-Hung Dinh, Yuji Hosaka

    Applied Optics
    |May 14, 2020
    PubMed
    Summary
    This summary is machine-generated.

    A new soft x-ray laser (SXRL) beamline with an intensity monitor enables precise ablation studies. This system accurately measures irradiation energy for surface processing and damage analysis.

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    Area of Science:

    • Physics
    • Materials Science
    • Optics

    Background:

    • Soft X-ray Laser (SXRL) technology is advancing.
    • Precise control and measurement of laser parameters are crucial for material processing and damage studies.

    Purpose of the Study:

    • To develop and characterize a novel soft x-ray laser beamline for ablation studies.
    • To implement an intensity monitor for accurate measurement of irradiation energy and fluence.

    Main Methods:

    • Generation of a 13.9 nm SXRL using Ag plasma and an oscillator-amplifier configuration.
    • Focusing the SXRL beam with a Mo/Si multilayer spherical mirror.
    • Utilizing a Mo/Si multilayer beam splitter and an X-ray CCD camera for intensity monitoring.

    Main Results:

    • The SXRL beamline delivers a 7 ps pulse width and ~200 nJ pulse energy.
    • An intensity monitor was successfully integrated, allowing for accurate derivation of irradiation energy.
    • The polarization dependence of the beam splitter was characterized and accounted for.

    Conclusions:

    • The developed SXRL beamline provides a reliable tool for ablation phenomena research.
    • The intensity monitor ensures precise control over experimental conditions for surface processing and damage assessment.
    • The system is also suitable for evaluating soft x-ray optics and resists.