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Numerical calculation of the mosaic error between mosaic gratings
Applied Optics
|May 14, 2020
Summary
A new model accurately calculates mosaic errors in gratings, improving grating quality evaluation. This research provides a theoretical basis for numerical grating mosaicking and error assessment.
Area of Science:
- Optics
- Materials Science
- Metrology
Background:
- Mosaic gratings are crucial optical components.
- Accurate characterization of mosaic errors is essential for performance.
- Existing methods for error calculation may be limited.
Purpose of the Study:
- To establish a theoretical model for mosaic error calculation in gratings.
- To experimentally validate the model using a Zygo interferometer.
- To provide a method for evaluating mosaic grating quality.
Main Methods:
- Developed a theoretical model based on grating and mosaic grating surface equations.
- Fabricated a mosaic grating using the developed model.
- Measured diffraction wavefronts using a Zygo interferometer for error calculation.
Main Results:
- The difference between the mosaic grating wavefront and the average element wavefront was 0.031λ.
- The mosaic grating achieved 90% of the maximum far-field intensity compared to error-free gratings.
- The model successfully calculated mosaic errors and evaluated grating quality.
Conclusions:
- The theoretical model provides a basis for numerical mosaicking of gratings.
- The developed method allows for accurate calculation and evaluation of mosaic grating errors.
- This work enhances the understanding and fabrication of high-quality mosaic gratings.
