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Subwavelength high-performance polarizers in the deep ultraviolet region
Optics Express
|May 15, 2020
Summary
High-performance metasurface polarizers are now achievable in the deep ultraviolet (DUV) region. This breakthrough utilizes a unique trilayer structure for exceptional light polarization control.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Metasurfaces offer novel optical functionalities.
- Achieving high-performance polarizers in the deep ultraviolet (DUV) spectrum remains challenging.
Purpose of the Study:
- To demonstrate high-performance metasurface polarizers in the DUV region.
- To investigate the design principles and experimental performance of these DUV metasurface polarizers.
Main Methods:
- Fabrication of a trilayer metasurface comprising Aluminum (Al) grating, Alumina (Al2O3) thin film, and Al thin film.
- Utilizing destructive interference of surface plasmon polaritons for polarization selection.
- Experimental characterization of the metasurface polarizer's performance, including extinction ratio and bandwidth.
Main Results:
- The metasurface demonstrated high reflectance for light polarized parallel to the grooves.
- Near-zero reflectance was achieved for perpendicular polarization due to destructive interference.
- An exceptionally high extinction ratio exceeding 6.2 × 10^6 was obtained.
- Bandwidth enhancement was achieved by tuning incident angle, period, and Al2O3 layer thickness.
Conclusions:
- High-performance metasurface polarizers are feasible in the deep ultraviolet (DUV) region.
- The demonstrated trilayer structure provides a robust platform for DUV polarization control.
- This work enables the development of advanced optical components for DUV applications.

