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RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of

Tianyi Wang1, Lei Huang2, Hyukmo Kang3

  • 1National Synchrotron Light Source II (NSLS-II), Brookhaven National Laboratory, PO Box 5000, Upton, NY, 11973, USA. tianyi@bnl.gov.

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Summary
This summary is machine-generated.

A new algorithm, Robust Iterative Fourier Transform-based dwell time Algorithm (RIFTA), optimizes ion beam figuring for ultra-precision X-ray mirrors. It reduces total processing time by half and significantly improves surface accuracy, achieving nanometer-level precision.

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Area of Science:

  • Optical Engineering
  • Materials Science
  • Nanotechnology

Background:

  • Advancements in synchrotron X-ray sources necessitate high-precision X-ray mirrors for diffraction-limited imaging.
  • Ion Beam Figuring (IBF) is a deterministic technique for ultra-precision mirror finishing, requiring accurate dwell time calculations.
  • Existing dwell time algorithms face challenges in ensuring non-negativity, minimizing total time, and adapting to process intervals.

Purpose of the Study:

  • To develop a Robust Iterative Fourier Transform-based dwell time Algorithm (RIFTA) for ultra-precision mirror finishing.
  • To ensure non-negative dwell times, minimize total processing time, and maintain accuracy in Ion Beam Figuring.
  • To provide a flexible and efficient dwell time solution adaptable to various Ion Beam Figuring process parameters.

Main Methods:

  • Stabilized and automated thresholded inverse filtering using the Nelder-Mead simplex algorithm for Fourier transform-based deconvolution.
  • A novel two-level iterative scheme to ensure non-negative dwell times and minimize total dwell time.
  • Bicubic resampling for flexible adaptation of the calculated dwell time map to Ion Beam Figuring process intervals.

Main Results:

  • Simulations and comparisons demonstrate RIFTA's effectiveness against state-of-the-art algorithms.
  • Experimental results show a two-fold reduction in total dwell time using RIFTA.
  • Achieved a significant reduction in surface roughness (RMS) from 3.4 nm to 1.1 nm in a 5x50 mm clear aperture after a single IBF run.

Conclusions:

  • RIFTA effectively calculates non-negative dwell times, minimizes total processing time, and enhances precision in Ion Beam Figuring.
  • The algorithm's robustness and efficiency are validated through simulations and experimental demonstrations.
  • RIFTA offers a significant advancement for the ultra-precision finishing of mirrors for advanced synchrotron X-ray applications.