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Hybrid Printing for the Fabrication of Smart Sensors
Published on: January 31, 2019
Design and tailoring of inks for inkjet patterning of metal oxides
Mei Fang1,2, Tianli Li1, Sangjian Zhang1
1Hunan Key Laboratory of Super Microstructure and Ultrafast Process, School of Physics and Electronics, Central South University, Changsha, Hunan 410083, People's Republic of China.
Abstract:
Inkjet printing has become a promising, efficient, inexpensive, scalable technique for materials deposition, mask-less and digital patterning in many device applications. Meanwhile, the ink preparation remains a challenge especially for printing functional oxide materials. Based on the principles of inkjet printing (especially relevant for piezoelectric drop-on-demand inkjet printer) and the process of the conversion of liquid ink into solid thin films of oxide materials, we present two approaches to the design and tailoring of inks: (i) oxide particle suspensions (e.g. SiO2, TiO2, Fe3O4) and (ii) metal-acetates precursor solutions for directly printing oxide thin films (e.g. ZnO, MgO, ITO and so forth). The solution inks are stable and produce tunable oxide films with high density and smooth surface. For some of the inks containing multi-type acetates with possible phase separation even before calcinations, we have developed a chelating procedure in order to tailor the films into single-phase homogeneity. The work lays a foundation for inkjet printing of oxides films for functional applications in electronic, photonic and energy devices.

