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Updated: Dec 20, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Xuan Liu1, Lisa Samfaß2, Kevin Kolpatzeck1
1Faculty of Engineering, University of Duisburg-Essen (UDE), 47057 Duisburg, Germany.
This study introduces a reconfigurable micro-electro-mechanical system (MEMS) reflection grating for terahertz beam steering. The novel design enhances diffraction efficiency, enabling precise control for high-speed scanning applications.
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