Phase estimation algorithm for the multibeam optical metrology

V V Zemlyanov1, N S Kirsanov1,2,3, M R Perelshtein1,3

  • 1Moscow Institute of Physics and Technology, 141700, Institutskii Per. 9, Dolgoprudny, Moscow Distr., Russian Federation.

Scientific Reports
|May 28, 2020
PubMed

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