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Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass

Joon Hyub Kim1, Ji-Hoon Han2, Chan Won Park3

  • 1Department of Nanomechatronics Engineering, Pusan National University, Busandaehak-ro 63 beon-gil 2, Geumjeong-gu, Busan 46241, Korea.

Sensors (Basel, Switzerland)
|May 30, 2020
PubMed

Keywords:
alkali-free glasshigh withstand voltagemicro-electromechanical system (MEMS)piezoresistive sensorsiliconstrain gauge

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