Related Experiment Video
Updated: Dec 20, 2025
Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
A bottom-up strategy toward a flexible vanadium dioxide/silicon nitride composite film with infrared sensing
1College of science, Beijing University of Technology, Beijing, China. zhangxinping@bjut. edu.cn.
Abstract:
Vanadium dioxide (VO2) attracts great attention due to its well-known metal-to-insulator transition. However, traditional VO2 films grown on rigid substrates are inflexible, which limits their applications. In this work, we successfully prepared VO2/silicon nitride (VO2/SN) composite films by a simple template method. The VO2/SN film shows high flexibility, strong infrared absorption, and drastic resistance change (>103) induced by the phase transition. The application of the VO2/SN film is presented by infrared sensing, which shows a high responsivity (720 V W-1) and short response time (409 ms).
