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Highly sensitive resonant sensor using quartz resonator cluster for inclination measurement
Fubin Chen1, Wenjie Tian2, Ying Wei1
1School of Automation, Beijing Information Science and Technology University, Beijing 100192, China.
The Review of Scientific Instruments
|June 4, 2020
Summary
This study introduces a highly sensitive quartz resonator inclinometer. The novel design offers precise inclination measurements with excellent resolution, suitable for demanding applications.
Area of Science:
- Physics
- Materials Science
- Sensor Technology
Background:
- Quartz crystal resonators exhibit high sensitivity to force, making them suitable for digital output sensors.
- Existing inclinometers may face challenges with common-mode disturbances and sensitivity limitations.
Purpose of the Study:
- To develop a highly sensitive inclinometer sensor utilizing a quartz resonator cluster.
- To improve force sensitivity and mitigate common-mode disturbances like temperature variations.
Main Methods:
- Designed a force-sensitive resonator cluster on a quartz substrate for a push-pull structure.
- Utilized the axial force from gravitational acceleration due to inclination to shift resonance frequency.
- Implemented a signal processing and fusion scheme for sensor data.
Main Results:
- Achieved a scale factor of 3.5102 Hz/1' for the sensor prototype.
- Demonstrated nonlinearity of 1.040% full scale within the -2° to +2° range.
- Attained a resolution better than 0.0055°.
Conclusions:
- The quartz resonator inclinometer sensor demonstrates high sensitivity and resolution.
- The push-pull design effectively eliminates common-mode disturbances and enhances force sensitivity.
- This technology presents a promising option for precision inclination measurement applications.
