Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS

Area of Science:

• Analytical Chemistry
• Materials Science
• Surface Science

Background:

• Complex metal oxide (CMO) thin films require advanced analytical techniques for precise characterization.
• Existing methods for analyzing thin film composition often lack spatial resolution or are time-consuming.
• Developing novel sampling strategies is crucial for detailed analysis of nanostructured materials.

Purpose of the Study:

• To introduce and validate online-laser ablation of solids in liquid (online-LASIL) coupled with ICP-MS as a 2D imaging technique for CMO thin films.
• To demonstrate the capability of correlating signal intensities with spatial origin on the sample surface.
• To develop a method for simultaneous online quantification of thin film composition.

Main Methods:

• Utilized an in-house built and optimized online-LASIL ablation cell for minimal particle dispersion.
• Prepared geometrically structured CMO thin films with varying compositions using pulsed laser deposition (PLD) and ion beam etching.
• Employed inductively coupled plasma mass spectrometry (ICP-MS) for elemental analysis.
• Implemented a standard addition concept for simultaneous online quantification.

Main Results:

• Achieved the first reported 2D intensity maps of 220 nm thick CMO thin films using online-LASIL.
• Successfully correlated signal intensities with the spatial origin of the signal on the sample.
• Developed and validated a new approach for simultaneous online quantification, correcting for instrumental drift.

Conclusions:

• Online-LASIL coupled with ICP-MS is a powerful technique for 2D elemental imaging of thin films.
• The developed method allows for precise spatial analysis and accurate online quantification of complex materials.
• This approach offers significant advancements in the characterization of nanostructured thin films.