Facile synthesis of an aminopropylsilane layer on Si/SiO₂ substrates using ethanol as APTES solvent

(3-aminopropyl)triethoxysilane (APTES) is a commonly used organosilane on surface functionalization of silicon oxide surfaces. However, its deposition process from solution-phase usually involves the use of toluene, which has often been identified as crucial for the formation of an aminopropylsilane monolayer. Toluene is ranked as a problematic solvent in the guide developed by a group referred to as the solvent sub-team of CHEM21. In this work, we propose a facile synthetic route for functionalizing a silicon substrate with APTES via solution-phase approach using only solvents that are classified as recommended. The influence of the APTES concentration, reaction times and different post-deposition conditions using acetic acid and methanol were studied in order to evaluate the quality and thickness of the organosilane layers.•The method uses ethanol as APTES solvent for functionalizing silicon dioxide surfaces and only uses solvents classified as recommended.•The method uses a solution phase approach, does not require complicated equipment and can be prepared at room temperature.