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Related Concept Videos

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The AFM Probe
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Updated: Dec 18, 2025

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
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Quantitative phase-mode electrostatic force microscopy on silicon oxide nanostructures.

C Albonetti1, S Chiodini1,2, P Annibale1,3

  • 1Consiglio Nazionale delle Ricerche - Istituto per lo Studio dei Materiali Nanostrutturati (CNR-ISMN), Bologna, Italy.

Journal of Microscopy
|June 16, 2020
PubMed
Summary
This summary is machine-generated.

Phase-mode electrostatic force microscopy (EFM-Phase) images surface potential on silicon oxide nanopatterns. This study demonstrates their use as benchmarks for EFM-Phase resolution, achieving ~60 nm lateral and ~20 electron charge resolution.

Keywords:
Electrostatic force microscopynanostructuresoxidation scanning probe lithographyprolate spheroidal coordinatessilicon oxide

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Area of Science:

  • Materials Science
  • Surface Science
  • Nanotechnology

Background:

  • Phase-mode electrostatic force microscopy (EFM-Phase) is used to visualize surface electrostatic potential.
  • Silicon oxide stripes fabricated via oxidation scanning probe lithography exhibit localized trapped charges.

Purpose of the Study:

  • To establish silicon oxide nanopatterns as benchmark samples for assessing EFM-Phase spatial and voltage resolution.
  • To quantitatively analyze electrostatic interactions and trapped charge distributions.

Main Methods:

  • Fabrication of silicon oxide stripes using oxidation scanning probe lithography.
  • Application of an analytical model using prolate spheroidal coordinates to describe tip-surface electrostatic interactions.
  • Quantitative fitting of experimental EFM-Phase data.

Main Results:

  • Demonstrated the utility of silicon oxide nanopatterns as benchmark samples for EFM-Phase.
  • Achieved a lateral resolution of approximately 60 nm.
  • Determined a charge resolution of approximately 20 electrons.
  • Identified a bimodal population of trapped charges within the nanopatterned stripes.

Conclusions:

  • EFM-Phase is a viable technique for imaging surface electrostatic potential with high resolution.
  • The developed analytical model accurately describes electrostatic interactions and enables quantitative analysis.
  • Silicon oxide nanopatterns serve as effective benchmarks for advancing EFM-Phase capabilities.