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Protective coatings for front surface silver mirrors by atomic layer deposition.

Pavel Bulkin, Sofia Gaiaschi, Patrick Chapon

    Optics Express
    |June 19, 2020
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    Summary

    Atomic layer deposition (ALD) of aluminum oxide (Al2O3) protects silver mirrors from oxygen plasma. A minimum thickness of 15 nm is required for optimal protection without impacting reflectivity.

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    Area of Science:

    • Materials Science
    • Surface Chemistry
    • Nanotechnology

    Background:

    • Front surface silver mirrors are crucial for various applications but susceptible to environmental degradation.
    • Protecting silver surfaces from oxidation and corrosion is essential for maintaining mirror performance.

    Purpose of the Study:

    • To evaluate the effectiveness of atomic layer deposition (ALD) aluminum oxide (Al2O3) layers in protecting front surface silver mirrors.
    • To determine the optimal thickness of ALD Al2O3 coatings for enhanced silver mirror protection.

    Main Methods:

    • Spectroscopic ellipsometry and reflection measurements were used to assess optical properties.
    • Pulsed glow-discharge optical emission spectroscopy (GD-OES) profiling was employed to analyze layer integrity and diffusion blocking.
    • Silver mirrors were exposed to oxygen plasma to test protective coating efficacy.

    Main Results:

    • ALD-deposited Al2O3 layers provide excellent conformality and integrity, preventing diffusion of corrosive species.
    • A minimum Al2O3 layer thickness of 15 nm (approximately 150 ALD cycles at 150°C) is necessary for effective protection.
    • 15 nm of ALD Al2O3 does not compromise the absolute reflectivity of silver mirrors between 320-2500 nm.

    Conclusions:

    • ALD Al2O3 is a highly effective protective coating for front surface silver mirrors against oxygen plasma exposure.
    • Optimizing ALD Al2O3 thickness is key to achieving robust protection without optical performance loss.
    • This technique offers a viable solution for enhancing the durability of silver mirrors in demanding environments.