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    This study introduces a novel X-ray imaging technique for 3D mapping of crystalline structures within thick samples. The method achieves high-resolution imaging of internal defects, advancing materials science and defect analysis.

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    Area of Science:

    • Materials Science
    • Crystallography
    • X-ray Optics

    Background:

    • Bragg ptychography is a powerful technique for nanoscale imaging.
    • Characterizing internal crystalline volumes in thick specimens remains challenging.
    • High-resolution defect analysis is crucial for materials development.

    Purpose of the Study:

    • To develop and demonstrate a generalized Bragg ptychography method for 3D mapping of embedded crystalline volumes.
    • To achieve high-resolution imaging and displacement field reconstruction of internal structures.
    • To assess the method's performance and resolution limits.

    Main Methods:

    • Utilized a pencil X-ray beam and a confocal Bragg volume defined by an objective lens and slit.
    • Employed an iterative oversampling reconstruction routine accounting for pupil function and lens aberrations.
    • Performed numerical studies on a crystalline grain with edge dislocations.

    Main Results:

    • Successfully reconstructed the shape and projected displacement field of internal crystalline volumes.
    • Achieved full resolution of edge dislocations with a displacement sensitivity of ~10 pm.
    • Demonstrated spatial resolutions of 26×27×123 nm³ (rms), improving with higher numerical aperture.

    Conclusions:

    • The new X-ray imaging method effectively generalizes Bragg ptychography for 3D internal volume mapping.
    • The technique offers high sensitivity and resolution for characterizing crystalline defects.
    • Lens aberrations were found to be non-critical, indicating robustness of the method.