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Motion-free TSOM using a deformable mirror.

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    This study introduces adaptive optics to through-focus scanning optical microscopy (TSOM) to overcome lateral instability. A motion-free TSOM tool achieves near-zero instability, enabling sub-4 nm accuracy for critical dimension measurements.

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    Area of Science:

    • Optical Metrology
    • Nanotechnology
    • Adaptive Optics

    Background:

    • Through-focus scanning optical microscopy (TSOM) is a model-based method for nanometer-scale measurements.
    • TSOM accuracy is limited by lateral instability during scanning.
    • Existing methods rely on matching target and reference TSOM data, sensitive to environmental conditions.

    Purpose of the Study:

    • To develop a more stable and accurate TSOM system.
    • To mitigate lateral instability in through-focus scanning optical microscopy.
    • To improve critical dimension (CD) measurement accuracy in nanometer-scale metrology.

    Main Methods:

    • Implemented adaptive optics with a tip/tilt mirror and Shack-Hartmann sensor to stabilize scanning.
    • Developed a motion-free TSOM system using a deformable mirror for scanning.
    • Utilized Fourier modal method for generating reference TSOM image libraries.

    Main Results:

    • Achieved lateral position stability within 33 nm PV using the initial adaptive optics system.
    • The motion-free TSOM tool reduced instability to near zero.
    • Demonstrated recognition accuracy of < 4 nm for CD values between 60-120 nm.

    Conclusions:

    • Adaptive optics effectively addresses lateral instability in TSOM.
    • The motion-free TSOM tool offers significant improvements in stability and accuracy.
    • This advanced TSOM system is suitable for precise nanometer-scale metrology applications.