Nanoindentation dataset of silicon and hafnia doped silicon coatings produced by magnetron sputtering

Mechanical properties of three different coatings comprising of pure silicon, 36 mol% HfO₂-doped silicon and 60 mol% HfO₂-doped silicon on SiC substrate material were obtained by nanoindentation. The coatings aim at oxidation protective layers in environmental barrier coating systems for SiC/SiC ceramic matrix composites (CMC). The examined coatings were produced by physical vapour deposition (magnetron sputtering) and have been tested under cycling conditions between room temperature and 1523 K until 100 h accumulated hot time. In order to measure the hardness and the reduced Young's modulus, a Berkovich tip has been used with a constant depth modulus of 100 nm and 160 nm. Two depth moduli have been chosen to investigate a possible volume impact on the mechanical properties. Six successfully produced indents have been averaged to examine the hardness and reduced Young's modulus. The testing has been done on polished cross sections thereby minimising the impact of the substrate material on the measured values. This article provides data related to "Hafnia-doped Silicon Bond Coats manufactured by PVD for SiC/SiC CMCs".