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An accurate inner diameter measurement.

Sanjid Arif Mahammad1, K P Chaudhary2, Sanjay Yadav3

  • 1Length, Dimension, and Nanometrology, CSIR- National Physical Laboratory, New Delhi 110012, India.

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|July 3, 2020
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Summary
This summary is machine-generated.

This study enhances diameter-measuring machine performance by improving probing accuracy using an autocollimator and liquid wedge datum. Optimized probing reduces measurement uncertainty to 140 nm for precise inner diameter determination.

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Area of Science:

  • Metrology and Measurement Science
  • Mechanical Engineering and Design

Background:

  • Inaccurate probing system deflection significantly degrades the performance of diameter-measuring machines.
  • Existing methods lack the precision required for high-accuracy dimensional metrology.

Purpose of the Study:

  • To improve the deflection behavior and accuracy of a probing system for diameter measurement.
  • To reduce the uncertainty associated with measuring the inner diameter of a ring gauge.

Main Methods:

  • Implemented an autocollimator and a liquid wedge angular positioning datum to enhance probing.
  • Utilized a ring gauge as a workpiece to evaluate deflection behavior and measure inner diameter.
  • Employed simulation for workpiece alignment and optimized stylus deflection to achieve zero error at zenith points.

Main Results:

  • Achieved an improved probing uncertainty as low as 40 nm.
  • Reduced the overall measurement uncertainty of the ring gauge's inner diameter to 140 nm.
  • Successfully combined probe swing and workpiece displacement for accurate diameter estimation.

Conclusions:

  • The developed method significantly enhances the accuracy of diameter-measuring machines.
  • The integration of an autocollimator and liquid wedge datum offers a novel approach to minimize probing errors.
  • The optimized system demonstrates high precision for dimensional metrology applications.