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Measurement of In-Plane Motions in MEMS

Mohamed Arabi1, Mary Gopanchuk2, Eihab Abdel-Rahman1

  • 1Department of Systems Design Engineering, University of Waterloo, Waterloo N2L 3G1, ON, Canada.

Sensors (Basel, Switzerland)
|July 8, 2020
PubMed

Keywords:
LDVMEMScomb-drivein-planemeasurement

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