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A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

HanYang Xu1, Yulong Zhao1, Kai Zhang1

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Sensors (Basel, Switzerland)
|July 8, 2020
PubMed

Keywords:
array capacitorliquid MEMS inclinometer sensorsuper-hydrophobicwide measurement range

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