Releasing the light field in subwavelength grating slot microring resonators for athermal and sensing applications

Silicon-on-insulator (SOI) platforms have attracted increasing interest for photonic integrated devices with an ultra-small footprint. The distinct feature is the strong light confinement in the silicon region due to a high refractive-index-contrast. In contrast, releasing the light field out of the silicon region is also of great significance for providing a useful supplement to existing light guiding mechanisms and for facilitating versatile applications. Here, subwavelength grating slot (SWGS) microring resonators, which can effectively release light out of the silicon region for athermal and sensing applications, are proposed and demonstrated. The mechanism of releasing light relies on the combination of a surface enhanced supermode in a slot waveguide and a Bloch mode in a subwavelength grating waveguide. Four types of racetrack microring resonators (strip, slot, strip-SWGS, and slot-SWGS) were fabricated for comparison. The slot-SWGS microring resonator shows the best performance for athermal and sensing applications. The demonstrations may be useful for new releasing-light-enabled devices and applications.