Single-layer metamaterial bolometer for sensitive detection of low-power terahertz waves at room temperature

This study demonstrates a metamaterial bolometer that can detect terahertz (THz) waves by measuring variations in electrical resistance. A metamaterial pattern for enhanced THz waves absorption and a composite material with a high temperature coefficient of resistance (TCR) are incorporated into a single layer of the bolometer chip to realize a compact and highly sensitive device. To detect the temperature change caused by the absorption of the THz waves, a polydimethylsiloxane mixed with carbon black microparticles is used. The thermosensitive composite has TCR ranging from 1.88%/K to 3.11%/K at room temperature (22.2-23.8^°C). In addition, a microscale metamaterial without a backside reflector is designed to enable the measurement of the resistance and to enhance the sensitivity of the bolometer. The proposed configuration effectively improves thermal response of the chip as well as the absorption of the THz waves. It was confirmed that the irradiated THz waves can be detected via the increment in the electrical resistance. The resistance change caused by the absorption of the THz waves is detectable in spite of the changes in resistance originating from the background thermal noise. The proposed metamaterial bolometer could be applied to detect chemical or biological molecules that have fingerprints in the THz band by measuring the variation of the resistance without using the complex and bulky THz time-domain spectroscopy system.