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Pulse to pulse control for highly precise and efficient micromachining with femtosecond lasers
Optics Express
|July 19, 2020
Summary
Femtosecond laser micromachining using pulse-on-demand (POD) technology with fast galvo scanners achieves high precision. This innovative approach significantly improves machining quality and reduces processing time compared to conventional methods.
Area of Science:
- Materials Science
- Optical Engineering
- Manufacturing Technology
Background:
- High-speed laser micromachining with femtosecond lasers and galvo scanners faces challenges in pulse positioning accuracy.
- Galvo mirror acceleration during speed or direction changes leads to poor machining quality, especially in corners.
Purpose of the Study:
- To explore the potential of femtosecond pulse-on-demand (POD) technology combined with fast galvo scanners for advanced laser micromachining.
- To evaluate an innovative setup for precise laser triggering at high repetition rates and scan speeds.
Main Methods:
- Developed and tested an innovative setup enabling precise laser triggering for MHz repetition rates and scan speeds up to 20 m/s.
- Estimated pulse position accuracy to be ≤1 µm.
- Compared performance against conventional scanning and skywriting (SW) techniques.
Main Results:
- Achieved pulse position accuracy of ≤1 µm.
- Demonstrated superior machining quality and precision compared to conventional scanning.
- Reduced processing time by approximately 40% compared to skywriting (SW).
Conclusions:
- Femtosecond POD technology integrated with fast galvo scanners offers significant advantages for laser micromachining.
- The proposed approach enhances precision, quality, and processing efficiency, outperforming existing methods.
