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    This study introduces a novel areal surface profilometry technique achieving sub-nanometer axial resolution. The method uses a low-coherence interferometer and dispersive element for precise surface measurements without mechanical scanning.

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    Area of Science:

    • Metrology
    • Optical Engineering
    • Surface Science

    Background:

    • Accurate surface characterization is crucial in various scientific and industrial fields.
    • Existing profilometry techniques often face limitations in axial resolution or require mechanical scanning.

    Purpose of the Study:

    • To design and characterize a new areal surface profilometry approach.
    • To achieve sub-nanometer axial resolution for surface profiling.
    • To enable non-contact, high-resolution surface measurements.

    Main Methods:

    • Development of a low-coherence interferometer enhanced with a dispersive element.
    • Utilizing an imaging spectrometer to detect optical path differences.
    • Employing equalization wavelengths for spectral fitting to determine surface profiles.
    • Performing measurements without mechanical scanning over extended ranges.

    Main Results:

    • Achieved a minimal axial resolution of 0.1 nm.
    • Demonstrated an axial measurement range of nearly 80 µm.
    • Successfully acquired surface profiles up to 1.5 mm in length.
    • Validated the system's capabilities on height standards.

    Conclusions:

    • The developed approach offers high-precision areal surface profilometry.
    • The system provides sub-nanometer axial resolution and a significant measurement range without mechanical scanning.
    • This technique has potential applications in fields requiring detailed surface analysis.