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Updated: Dec 14, 2025

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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
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Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive.
Optics Express
|July 19, 2020
Summary
This study introduces a novel electrothermal kirigami microscanner for endoscopic use. It achieves a millimeter-range lens drive with low power, enabling advanced biomedical imaging.
Area of Science:
- Micro/Nano Engineering
- Biomedical Engineering
- Materials Science
Background:
- Kirigami, a paper art, inspires novel micro-devices.
- Endoscopic procedures require miniaturized, precise optical scanning.
- Electrothermal actuation offers low-power, controlled motion.
Purpose of the Study:
- To develop an electrothermally-actuated kirigami microscanner.
- To enable millimeter-range lens drive for endoscopic applications.
- To demonstrate a low-power, compact optical scanning solution.
Main Methods:
- Fabrication of a circular pyramidal kirigami structure using microelectromechanical systems (MEMS).
- Integration of spiral-curved thermal bimorphs for actuation.
- Utilizing Joule heating for electrothermal transformation and out-of-plane movement.
Main Results:
- Successful fabrication of a 4.5 mm × 4.5 mm kirigami microscanner.
- Demonstration of large four-step pyramidal actuation.
- Achieved a 1.1-mm lens travel range with only 128 mW power consumption.
Conclusions:
- The proposed kirigami microscanner is a viable solution for low-power, high-displacement lens driving in endoscopic devices.
- This technology offers potential for enhanced biomedical imaging and diagnostics.
- The compact design and efficient actuation pave the way for next-generation endoscopic tools.

