MEMS-on-fiber ultrasonic sensor with two resonant frequencies for partial discharges detection

A novel fiber optic extrinsic Fabry-Perot interferometric (EFPI) ultrasonic sensor with two resonant frequencies for detecting the partial discharges (PDs) in switchgear is demonstrated. The key sensing element consists of two 5-µm-thickness and beam-supported silicon diaphragms, whose natural frequencies are designed differently to enable the sensor to achieve the resonant responses at two different frequencies, thus obtaining a broadened frequency response. The sensing element is fabricated by employing the microelectromechanical systems (MEMS) technology on a silicon-on-insulator (SOI) wafer. The experimental results show that the sensor possesses two resonant frequencies of 31 kHz and 63 kHz, and obviously, shows a highly sensitive frequency response over a broader range compared with the approach composed of a single sensing diaphragm with only one resonant frequency. The noise-limited minimum detectable ultrasonic pressure (MDUP) reaches 251 µPa/Hz^1/2@ 31 kHz and 316 µPa/Hz^1/2@ 63 kHz, respectively.