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Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
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Ultra-sensitive refractive index sensor using CMOS plasmonic transducers on silicon photonic interferometric

A Manolis, E Chatzianagnostou, G Dabos

    Optics Express
    |July 19, 2020
    PubMed
    Summary

    This study introduces a novel CMOS-compatible plasmo-photonic sensor using aluminum and Si3N4 waveguides. It achieves record bulk sensitivity for biosensing applications, enabling mass production.

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    Area of Science:

    • Photonics
    • Plasmonics
    • Biosensing

    Background:

    • Integrating plasmonics and silicon photonics offers high-performance biosensing.
    • A key challenge is achieving this integration using only CMOS-compatible materials.

    Purpose of the Study:

    • To demonstrate a novel CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer (MZI) sensor.
    • To achieve high bulk sensitivity for refractive-index sensing applications.

    Main Methods:

    • Fabrication of an MZI sensor using silicon nitride (Si3N4) waveguides and aluminum stripes.
    • Integration of a thermo-optic phase shifter and variable optical attenuator for performance optimization.

    Main Results:

    • Achieved a record-high bulk sensitivity of 4764 nm/RIU.
    • Demonstrated a high extinction ratio of up to 38 dB.
    • Confirmed CMOS compatibility for potential volume manufacturing.

    Conclusions:

    • The developed sensor represents a significant advancement in plasmo-photonic refractive-index sensing.
    • Its CMOS compatibility and high sensitivity pave the way for widespread adoption in biosensing.