Chemical force microscopy for hot-embossing lithography release layer characterization
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Updated: Dec 14, 2025
Quantitative and Qualitative Examination of Particle-particle Interactions Using Colloidal Probe Nanoscopy
Published on: July 18, 2014
Neil S Cameron1, Arnaud Ott1, Hélène Roberge1
1Industrial Materials Institute: National Research Council Canada, 75 Blvd. de Mortagne, Boucherville, Québec, J4B 6Y4, Canada. neil.cameron@cnrc.gc.ca.
Abstract:
We employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different hydro- and hydrofluoroalkyl self-assembling monolayers (SAMs) interacting with a thin-film of poly(cyclic olefin), (PCO) to model the hot-embossing stamp-polymer interaction over a temperature range spanning the glass transition of the PCO.
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