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Updated: Dec 14, 2025

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Grid-based electron-solid interaction simulation for characterizing high-dimensional microstructures.

Ze Fu Zhou1, Shu Jian Chen2, Chang Xi Zheng3

  • 1State Key Laboratory of Geomechanics and Deep Underground Engineering, University of Mining and Technology, Xuzhou 221008, China.

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|July 21, 2020
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Summary

A new grid-based simulation scheme enhances electron-solid interaction simulations (ESIS) for complex microstructures. This method improves three-dimensional (3D) scanning electron microscope (SEM) analysis by accurately modeling features like diffusion zones and pores.

Keywords:
Electron–solid interaction simulationHigh-dimensional microstructureInterfacial diffusion zoneScanning electron microscopeThree-dimensional characterization

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Area of Science:

  • Materials Science
  • Computational Physics
  • Microscopy

Background:

  • Three-dimensional (3D) micro- and nanostructural characterization is crucial in diverse research fields.
  • Scanning electron microscopy (SEM) coupled with electron-solid interaction simulations (ESIS) is a powerful technique.
  • Current 3D SEM-ESIS methods struggle with complex microstructures.

Purpose of the Study:

  • To develop a novel simulation scheme for advanced 3D SEM-ESIS.
  • To enable the characterization and modeling of intricate microstructures.
  • To investigate the impact of geometric features on scattering signals.

Main Methods:

  • A new grid-based simulation scheme was developed for ESIS.
  • This approach represents sample compositions using a grid of points.
  • It contrasts with traditional region-based methods.

Main Results:

  • The grid-based scheme effectively simulates complex microstructures.
  • Interfacial diffusion zones and porosity were found to significantly influence scattering signals.
  • The simulation allows numerical investigation of various geometric features.

Conclusions:

  • The developed grid-based scheme is a valuable tool for interpreting 3D SEM-ESIS data.
  • It enhances the understanding of materials with complex microstructural features.
  • This work facilitates advancements in SEM-based 3D reconstruction.