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Related Experiment Video

Updated: Dec 13, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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An Improved Passivity-based Control of Electrostatic MEMS Device.

Mutaz Ryalat1, Hazem Salim Damiri2, Hisham ElMoaqet1

  • 1Mechatronics Engineering Department, School of Applied Technical Sciences, German Jordanian University, Amman 11180, Jordan.

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Summary

This study introduces a new controller to overcome pull-in instability in electrostatic microelectromechanical systems (MEMS). The controller enhances device performance and extends the operational range, improving MEMS device stability.

Keywords:
Hamiltonian systemsMEMSobserver designpassivity-based controlpull-in stability

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Area of Science:

  • Control Systems Engineering
  • Microelectromechanical Systems (MEMS)

Background:

  • Electrostatic microelectromechanical systems (MEMS) face performance limitations due to pull-in instability.
  • This phenomenon restricts the operational range of MEMS devices based on gap distance.

Purpose of the Study:

  • To design a controller that extends the stabilization range of electrostatic MEMS devices.
  • To enhance the overall performance of these devices.

Main Methods:

  • Utilized the interconnection and damping assignment-passivity based control (IDA-PBC) method.
  • Incorporated coordinate transformations and coupled mechanical-electrical subsystems.
  • Developed a speed observer to estimate unmeasurable speeds.

Main Results:

  • Successfully extended the travel range of parallel plates in MEMS devices.
  • Demonstrated enhanced device performance, even with reduced damping ratios.
  • Verified controller effectiveness through numerical simulations.

Conclusions:

  • The developed IDA-PBC controller effectively mitigates pull-in instability in electrostatic MEMS.
  • The controller significantly improves MEMS device operational range and performance characteristics.