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Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

Rui Hao1, Huijun Yu1, Bei Peng1

  • 1School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Sensors (Basel, Switzerland)
|July 26, 2020
PubMed

Keywords:
PZT hysteresisinertial sensor calibrationmicro vibratory platformresidual stress

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