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Updated: Dec 13, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Research Status and Development Trend of MEMS Switches: A Review

Tongtong Cao1, Tengjiang Hu1, Yulong Zhao1

  • 1State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|July 26, 2020
PubMed

Keywords:
MEMS switchesbistable mechanismdriving principlereliability

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