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Fabrication of Silica Ultra High Quality Factor Microresonators
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High optical damage threshold on-chip lithium tantalate microdisk resonator.

Xiongshuo Yan, Yi'an Liu, Licheng Ge

    Optics Letters
    |August 1, 2020
    PubMed
    Summary

    Researchers fabricated a lithium tantalate microdisk resonator on insulator (LTOI) film. This device achieved efficient second-harmonic generation, paving the way for LTOI in integrated photonic chips.

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    Area of Science:

    • Materials Science
    • Photonics
    • Nonlinear Optics

    Background:

    • Lithium tantalate (LT) is a highly desirable optical nonlinear material due to its high damage threshold and UV transparency.
    • Recent advancements include the development of optical-grade LT nanoscale films.

    Purpose of the Study:

    • To fabricate a high-quality-factor lithium tantalate microdisk resonator using LT-on-insulator (LTOI) film.
    • To demonstrate efficient nonlinear optical processes, specifically second-harmonic generation (SHG) and third-harmonic generation (THG), in the fabricated LTOI microdisk.

    Main Methods:

    • Fabrication of an LT microdisk resonator on an insulator (LTOI) film using focused ion beam (FIB) milling.
    • Characterization of the microdisk resonator's quality factor (Q-factor).
    • Experimental measurement of second-harmonic waves and observation of cascaded third-harmonic generation.

    Main Results:

    • A high-quality-factor (Q ∼ 10^5) LTOI microdisk resonator was successfully fabricated.
    • Efficient second-harmonic waves (2 µW output) were achieved with approximately 500 mW input power.
    • Cascaded third-harmonic generation was observed in the LTOI microdisk.

    Conclusions:

    • The fabricated LTOI microdisk resonator demonstrates significant potential for nonlinear optical applications.
    • This work highlights the promise of LTOI films for developing integrated photonic devices.
    • The efficient SHG and observed THG in the LTOI microdisk open avenues for on-chip frequency conversion technologies.