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Related Experiment Video

Updated: Dec 13, 2025

Author Spotlight: Microbial Control and Monitoring Strategies for Cleanroom Environments and Cellular Therapies
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A cleanroom in a glovebox.

Mason J Gray1, Narendra Kumar1, Ryan O'Connor1

  • 1Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA.

The Review of Scientific Instruments
|August 6, 2020
PubMed
Summary
This summary is machine-generated.

We developed a cost-effective cleanroom-in-a-glovebox for fabricating and characterizing sensitive quantum materials and devices in an inert argon atmosphere.

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Area of Science:

  • Materials Science
  • Quantum Physics
  • Nanotechnology

Background:

  • Advancing materials science, quantum phases, and device fabrication necessitates cleaner samples and smaller feature sizes.
  • Traditional cleanrooms are costly and may not protect oxygen/water-sensitive materials.
  • There is a growing need for accessible, lower-cost facilities to train a quantum workforce.

Purpose of the Study:

  • To present a novel cleanroom-in-a-glovebox system for material fabrication and device characterization.
  • To demonstrate a versatile, cost-effective alternative to traditional cleanroom facilities.
  • To enable in-situ interfacing with advanced vacuum equipment.

Main Methods:

  • Fabrication and characterization of devices within an inert argon atmosphere glovebox.
  • Integration of a custom-built antechamber for vacuum system interfacing.
  • Demonstration of various fabrication and characterization techniques within the glovebox.

Main Results:

  • Successful fabrication and characterization of devices within the glovebox.
  • Maintenance of an inert argon environment throughout the process.
  • Demonstrated capability to interface with ultra-high vacuum equipment.

Conclusions:

  • The cleanroom-in-a-glovebox offers a versatile and affordable solution for quantum material and device research.
  • This system reduces the need for dedicated cleanroom space and associated costs.
  • It facilitates advanced research by enabling integration with systems like molecular-beam epitaxy and scanning tunneling microscopy.